Design and Validation of Silicon-on-Insulator Based U Shaped Thermal Microactuator
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: International Journal of Materials, Mechanics and Manufacturing
سال: 2014
ISSN: 1793-8198
DOI: 10.7763/ijmmm.2014.v2.106